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Ceramics
Ceramics
Products Name:  

Ceramics

Item No:   423743
Update time:  2005-5-20 15:49:00
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Ceramics Description

Features

  • Has excellent chemical-proof nature
    Because of its non-active form it has a high resistance feature from chemical corrosion, and it is generally not affected by acidic alkaline organic solvents. Such feature is more outstanding than any other metals or plastics.
  • Has non-abrasion characteristic
    With its high level of fineness and harndess, it has a non-abrasion characteristic that is 15-20 times higher than other metals.
  • Electricity insulation capability
    It has a high degree of electricity insulation ability in high temperature and against high voltage, and also resistance and elasticity and low genetics-loss rates.
  • Outstanding heat-resistance
    The maximum temperature of Alumina surpasses the majority of other metals, and the actual temperature can go up to 1600-1700°C.

Technology

  • In Alumina sintering methods, there is the Slip Casting method that our company uses and the CIP method that is used by other companies, in which both method has its strengths and weaknesses along with penetration barriers.
  • Slip Casting method, comprised of shaping the product from a plaster mold and then pouring a slip that is made from combination of Al 2 O₃powder and its variants to reconstruct its shape through osmosis pressure and then heating it in a kiln, may be a disadvantageous way for mass production; however, because of it is comparably low in "binder" attacks it is used for manufacturing of high-purity Alumina products, and it is appropriate for hard to shape products that require low-quantity production. On the other hand, CIP (Cold Isostatic Pressuring) method for all purposes apply same pressure into the powder and has the strength of massively producing simple-shape products; however, it cannot produce products that has complex shapes and because of its high number of "binder" attacks it has the weakness of lowered level of purity.

Principal products

Product name Product usage and instructions
Focus Ring Although used similarly with the Si Focus Ring for its plasma placing and insulation performance, it is used in the semiconductor manufacturing equipment industry that has higher demand for insulation capabilities than for its high degree of purity
Edge Ring Used similarly with Si Edge Ring for its wafer placement and plasma stabilizing capabilities, it is used for semiconductor manufacturing equipment that requires insulation capabilities.
Ring Confiment Cap It plays a role in removing pressure in the plasma, and it is used for outside part of the Si electrode located in the upper part of the chamber.
Other products Guide Ring, Rotation Ring Cover, Wafer Chuck, Wafer Clamp,
Robot Arm, Robot Blade, Hot Arm, Cold Arm, Ceramic Pipe,
Lift Pin, Ceramic Screw..etc.

 

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