Super high purity solid SiC

Products Name:	Super high purity solid SiC
Item No:	90438
Update time:	2005-4-21 18:05:00
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Super high purity solid SiC Description

Solid SiC made by chemical vapor deposition process is a super high purity SiC suitable for semiconductor equipments parts.

Features

Super high purity
Excellent chemical resistance
Very little metal diffusion
No out gassing
Theoretical density(β-SiC)

Application

Wafer carriers
Susceptors, dummy Wafer
Guide rings
Parts for etching systems etc.

Printable Super high purity solid SiC, Imprinted, Branded Super high purity solid SiCPrinting, Printed Super high purity solid SiC
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