Wet oxidation furnace

Products Name:	Wet oxidation furnace
Item No:	241220
Update time:	2005-6-3 8:12:00
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Wet oxidation furnace Description

Features

Wafer size : 4
Operating temperature : 400°C~1250°C
Performance : 3 Zone
1>Ramp-up rate : RT-600°C - 20minute
(Cool down rate : 1000 ~ 800°C - 7°C/min)
(Thermal Flat Zone :300mm)
(Supply Voltage : φ2 220V)
2>Uniform Heat Zone
(between: 400°C~800°C (200mm~250mm) ±1°C)
(between: 800°C~1250°C (250mm~300mm) ±0.5°C)

Printable Wet oxidation furnace, Imprinted, Branded Wet oxidation furnacePrinting, Printed Wet oxidation furnace
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